Blank Cover Image

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

著者名:
Grigg, D. ( Zygo Corp. (USA) )
Felkel, E. ( Zygo Corp. (USA) )
Roth, J. ( Zygo Corp. (USA) )
Colonnd de Lega, X. ( Zygo Corp. (USA) )
Deck, L. ( Zygo Corp. (USA) )
de Groot, P. J. ( Zygo Corp. (USA) )
さらに 1 件
掲載資料名:
MEMS, MOEMS, and Micromachining
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5455
発行年:
2004
開始ページ:
429
終了ページ:
436
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
言語:
英語
請求記号:
P63600/5455
資料種別:
国際会議録

類似資料:

1 国際会議録 Surface profiling using a reference-scanning Mirau interference microscope

Colonna de Lega, X., Grigg, D., de Groot, P.

SPIE - The International Society of Optical Engineering
7 国際会議録 Characterization of a geometrically desensitized interferometer for flatness testing

Lega,X.Colonna de, Biegen,J.F., Stephenson,D., Groot,P.J.de

SPIE - The International Society for Optical Engineering
2 国際会議録 Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

de Groot, P., Colonna de Lega, X., Grigg, D.

SPIE-The International Society for Optical Engineering
8 国際会議録 Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS [6186-22]

Emery Y., Cuche E., Marquet F., Aspert N., Marquet P., Kuhn J., Botkine M., Colomb T., Montfort F., Charriere F., …

SPIE - The International Society of Optical Engineering
3 国際会議録 Transparent film profiling and analysis by interference microscopy

P. J. de Groot, X. Colonna de Lega

Society of Photo-optical Instrumentation Engineers
9 国際会議録 Adjustable coherence depth in a geometrically desensitized interferometer

de Groot,P.J., Deck,L.L., Colonna de Lega,X.

SPIE-The International Society for Optical Engineering
4 国際会議録 Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler

X. Colonna de Lega, P. J. de Groot

Society of Photo-optical Instrumentation Engineers
10 国際会議録 Interferometer design for writing Bragg gratings in optical fibers

de Groot, P.J., Colonna de Lega, X., Dawson, J.W., MacDougall, T.W., Lu, M., Troll, J.R.

SPIE-The International Society for Optical Engineering
5 国際会議録 Signal modeling for modern interference microscopes

de Groot, P. J., Colonna de Lega, X.

SPIE - The International Society of Optical Engineering
11 国際会議録 Design and fabrication of optical microcavities using ？-？ semiconductor-based MOEMS

Viktorovitch,P., Leclercq,J.L., Goutain,E., Rondi,D.

SPIE-The International Society for Optical Engineering
6 国際会議録 Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Montgomery, P. C., Montaner, D., Manzardo, O., Herzig, H. -P.

SPIE - The International Society of Optical Engineering
12 国際会議録 Aberration characterization using frequency domain analysis of low-coherence interferograms (Invited Paper)

Lega, X. Colonna de

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12