Optical MEMS components fabrication using micromachning of (111)-oriented silicon wafers
- 著者名:
- Cristea, D. ( National Institute for Research and Development in Microtechnologies (Romania) )
- Manea, E. ( National Institute for Research and Development in Microtechnologies (Romania) )
- Kusko, M. ( National Institute for Research and Development in Microtechnologies (Romania) )
- 掲載資料名:
- MEMS, MOEMS, and Micromachining
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5455
- 発行年:
- 2004
- 開始ページ:
- 381
- 終了ページ:
- 389
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453785 [0819453781]
- 言語:
- 英語
- 請求記号:
- P63600/5455
- 資料種別:
- 国際会議録
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