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Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

著者名:
Lee, C. Y. ( National Taiwan Univ. (Taiwan) )
Wu, T. T. ( National Taiwan Univ. (Taiwan) )
Chen, Y. Y. ( National Taiwan Univ. (Taiwan) )
Cheng, Y. C. ( National Taiwan Univ. (Taiwan) )
Chen, W. J. ( National Taiwan Univ. (Taiwan) )
Pao, S. Y. ( National Taiwan Univ. (Taiwan) )
Chang, P. Z. ( National Taiwan Univ. (Taiwan) )
Chen, P. H. ( National Taiwan Univ. (Taiwan) )
Yen, K. H. ( National Taiwan Univ. (Taiwan) )
Xiao, F. Y. ( National Taiwan Univ. (Taiwan) )
さらに 5 件
掲載資料名:
MEMS, MOEMS, and Micromachining
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5455
発行年:
2004
開始ページ:
319
終了ページ:
330
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
言語:
英語
請求記号:
P63600/5455
資料種別:
国際会議録

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