Blank Cover Image

Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

著者名:
Schropfer, G. ( Coventor SARL (France) )
McNie, M. ( QinetiQ Ltd. (United Kingdom) )
da Silva, M. ( Coventor, Inc. (USA) )
Davies, R. ( QinetiQ Ltd. (United Kingdom) )
Rickard, A. ( QinetiQ Ltd. (United Kingdom) )
Musalem, F. -X. ( Coventor SARL (France) )
さらに 1 件
掲載資料名:
MEMS, MOEMS, and Micromachining
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5455
発行年:
2004
開始ページ:
116
終了ページ:
127
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
言語:
英語
請求記号:
P63600/5455
資料種別:
国際会議録

類似資料:

1 国際会議録 Characterization and optimization of deep dry etching for MEMS applications

Rickard,A., McNie,M.E.

SPIE-The International Society for Optical Engineering
7 国際会議録 Comparison between an optical and a capacitive transducer for a novel multiaxial bulk-micromachined accelerometer

Schropfer,G., de Labachelerie,M.

SPIE-The International Society for Optical Engineering
2 国際会議録 Control of Stress in a Metal-Nitride-Metal Sandwich for CMOS-Compatible Surface Micromachining

Davies, Rhodri R., Combes, David J., McNie, Mark E., Brunson, Kevin M.

Materials Research Society
8 国際会議録 Integration of CMOS process-compatible optoelectronic interconnects for high-speed communications (Invited Paper)

Zhang, X., Choi, G., Lin, L., Liu, Y., Chen, R.T.

SPIE-The International Society for Optical Engineering
3 国際会議録 Engineering in-and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining

Davies,R.R., McNie,M.E., Brunson,K.M., Combes,D.J.

SPIE-The International Society for Optical Engineering
9 国際会議録 Characterization and design optimization for CMOS-compatible MEMS

Shia,T., Yang,S.-I., Lee,C., Yao,C.-M., Lee,M.H.

SPIE-The International Society for Optical Engineering
4 国際会議録 Factorial Experiment on CMOS-MEMS RIE Post Processing

Zhu, X., Greve, D.W., Lawton, R., Presser, N., Fedder, G.K.

Electrochemical Society
10 国際会議録 Quartzite Quarry Waste Recovery: A Case Study

R.M.F. Lima, R.M.M. Morais, A.F.S. Silva

Trans Tech Publications
5 国際会議録 CMOS-compatible RF MEMS switch

Lakamraju, N. V., Kim, B., Phillips, S. M.

SPIE - The International Society of Optical Engineering
11 国際会議録 Designing MEMS for manufacturing (Invited Paper)

Wolter, A., Herrman, A., Yildiz, G., Schenk, H., Lakner, H.

SPIE - The International Society of Optical Engineering
6 国際会議録 Studies of the Performance of Nanostructured and other Compatible Consolidation Products for Historical Renders

G. Borsoi, M. Tavares, R. Veiga, A. Santos Silva

Trans Tech Publications
12 国際会議録 Teaching Experience on Metal Forming Processes through Case Study Methodology

A. Estévez, F.J. Doblas, C. Vallellano, D. Morales, G. Centeno

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12