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Recent progress in electron beam mastering for 100Gb/in2 and beyond (Invited Paper)

著者名:
Furuki, M. ( Sony Corp. (Japan) )
Takeda, M. ( Sony Corp. (Japan) )
Yamamoto, M. ( Sony Corp. (Japan) )
Saito, K. ( Sony Corp. (Japan) )
Shinoda, M. ( Sony Corp. (Japan) )
Fujiki, T. ( Sony Corp. (Japan) )
Aki, Y. ( Sony Corp. (Japan) )
Koizumi, M. ( JEOL Ltd. (Japan) )
Miyokawa, T. ( JEOL Ltd. (Japan) )
Muto, M. ( JEOL Ltd. (Japan) )
さらに 5 件
掲載資料名:
Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5380
発行年:
2004
開始ページ:
47
終了ページ:
55
総ページ数:
9
出版情報:
Bellingham: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452931 [0819452939]
言語:
英語
請求記号:
P63600/5380
資料種別:
国際会議録

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