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Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films

著者名:
Ryu, S. O. ( Electronics and Telecommunications Research Institute (South Korea) )
Cho, S. M. ( Electronics and Telecommunications Research Institute (South Korea) )
You, I. K. ( Electronics and Telecommunications Research Institute (South Korea) )
Yoon, S. M. ( Electronics and Telecommunications Research Institute (South Korea) )
Kim, K. D. ( Electronics and Telecommunications Research Institute (South Korea) )
Yu, B. G. ( Electronics and Telecommunications Research Institute (South Korea) )
さらに 1 件
掲載資料名:
Materials for infrared detectors III : 7-8 August 2003, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5209
発行年:
2003
開始ページ:
148
終了ページ:
155
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450821 [0819450820]
言語:
英語
請求記号:
P63600/5209
資料種別:
国際会議録

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