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Testing microcomponents by speckle interferometry

著者名:
  • Aswendt, P. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
  • Hofling, R. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
  • Hiller, K. ( Chemnitz Univ. of Technology (Germany) )
掲載資料名:
Microsystems Metrology and Inspection
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3825
発行年:
1999
開始ページ:
165
終了ページ:
173
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819433114 [081943311X]
言語:
英語
請求記号:
P63600/3825
資料種別:
国際会議録

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