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Manufacturability of a 0.18-μm OPC technology

著者名:
Hsieh, R. G. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Lin, H. T. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Lin, J. C. H. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Yen, A. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Yoo, C. S. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Wang, J. J. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
さらに 1 件
掲載資料名:
Photomask and X-Ray Mask Technology VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3748
発行年:
1999
開始ページ:
19
終了ページ:
26
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
言語:
英語
請求記号:
P63600/3748
資料種別:
国際会議録

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