Carbon-rich cyclopolymers: their synthesis, etch resistance, and application to 193-nm microlithography
- 著者名:
Pasini, D. ( Univ. of California/Berkeley ) Low, E. ( Univ. of California/Berkeley ) Meagley, R. P. ( Univ. of California/Berkeley ) Frechet, J. M. J. ( Univ. of California/Berkeley ) Willson, C. G. ( Univ. of Texas at Austin ) Byers, J. D. ( International SEMATECH ) - 掲載資料名:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3678
- 発行年:
- 1999
- 開始ページ:
- 94
- 終了ページ:
- 103
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- 言語:
- 英語
- 請求記号:
- P63600/3678-1
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |