Formation of SiGe Nanoparticles by Dry and Steam Thermal Oxidation of Thin Polycrystalline Layers
- 著者名:
Ortiz, M.I. Ballesteros, C. Rodriguez, A. Sangrador, J. Rodriguez, T. Avella, M. Martin, P. Jimenez, J. - 掲載資料名:
- Quantum confined semiconductor nanostructures : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 737
- 発行年:
- 2003
- 開始ページ:
- 511
- 終了ページ:
- 1032
- 総ページ数:
- 528
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996748 [1558996745]
- 言語:
- 英語
- 請求記号:
- M23500/737
- 資料種別:
- 国際会議録
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5
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