Buckling Instabilities of Thin Cap Layers Deposited Onto Low-k Dielectric Films

Buckling Instabilities of Thin Cap Layers Deposited Onto Low-k Dielectric Films

著者名:

掲載資料名:

Polymer/metal interfaces and defect mediated phenomena in ordered polymers : symposia held December 2-6, 2002, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

734

発行年:

2003

開始ページ:

383

終了ページ:

780

総ページ数:

406

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996717 [1558996710]

言語:

英語

請求記号:

M23500/734

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014605
シリーズID:	PA00000011
会議名:	Symposium on polymer/metal interfaces and defect mediated phenomena in ordered polymers
回次:	2002
会議開催地:	Boston, MA, USA
会議開催年:	2002.12.02-2002.12.06

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