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A Model For Comprehensive Studies Of Porosity In Mesoporous Low-K Dielectrics

著者名:
Petkov, Mihail P.  
掲載資料名:
Modeling and numerical simulation of materials behavior and evolution : symposium held April 2-5, 2002, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
731
発行年:
2002
開始ページ:
285
終了ページ:
580
総ページ数:
302
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996670 [1558996672]
言語:
英語
請求記号:
M23500/731
資料種別:
国際会議録

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