Investigation Of Oxidation Process Of Ultrathin Films Of Amorphous And/Or Nano-Crystalline Silicon Films

Investigation Of Oxidation Process Of Ultrathin Films Of Amorphous And/Or Nano-Crystalline Silicon Films

著者名:

Mu, R.

掲載資料名:

Nanostructured interfaces : symposium held April 2-4, 2002, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

727

発行年:

2002

開始ページ:

123

終了ページ:

130

総ページ数:

8

出版情報:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558996632 [155899663X]

言語:

英語

請求記号:

M23500/727

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014600
シリーズID:	PA00000011
会議名:	Symposium on nanostructured interfaces
回次:	2002
会議開催地:	San Francisco, CA, USA
会議開催年:	2002.04.02-2002.04.04

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