Influence Of Oxygen Addition And Substrate Temperature On Textured Growth Of Al Doped Zno Thin Films Prepared By RF Magnetron Sputtering

Influence Of Oxygen Addition And Substrate Temperature On Textured Growth Of Al Doped Zno Thin Films Prepared By RF Magnetron Sputtering

著者名:

掲載資料名:

Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

721

発行年:

2002

開始ページ:

171

終了ページ:

178

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996571 [1558996575]

言語:

英語

請求記号:

M23500/721

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014594
シリーズID:	PA00000011
会議名:	Symposium on magnetic and electronic films
回次:	2002
会議開催地:	San Francisco, CA, USA
会議開催年:	2002.04.01-2002.04.04

類似資料:

1 国際会議録 Pole Figure Analysis Of Epitaxial Films Of ZnO:2Wt%Al Grown On Sapphire Substrates By RF Magnetron Sputtering Kuppusami, P., Fiechter, S., Ellmer, K. Materials Research Society	7 国際会議録 Influence of Annealing and Europium-Doping on the Structure and Optical Properties of ZnO Thin Films Grown on Quartz Substrate by Magnetron Sputtering Q.Q. Dai, L. Luo, F.Y. Huang, D.P. Xiong, X.G. Tang Trans Tech Publications
2 国際会議録 Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering F. Huan, J.F. Leng, Z.C. Meng, B. Sun, W.S. He Trans Tech Publications	8 国際会議録 Influence of Deposition Parameters on Surface Texturing of ZnO:Al Films Prepared by In-Line RF Magnetron Sputtering Jun-Sik Cho, Young-Jin Kim, Jeong Chul Lee, Sang-Hyun Park, Kyung Hoon Yoon Materials Research Society
3 国際会議録 The Growth of Surface Textured Aluminum Doped ZnO Films for a-Si Solar Cells by RF Magnetron Sputtering at Low Temperature Selvan, J. A. Anna, Keppner, H., Shah, A. MRS - Materials Research Society	9 国際会議録 Polycrystalline ZnO- and ZnO:Al-Layers: Dependence of Film Stress and Electrical Properties on the Energy Input During the Magnetron Sputtering Deposition Ellmer, K., Cebulla, R., Wendt, R. MRS - Materials Research Society
4 国際会議録 Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering Y.B. Wu, S. Lei, Z. Wang, R.H. Zhao, L. Huang Trans Tech Publications	10 国際会議録 Erbium-doped semiconductor thin films prepared by RF magnetron sputtering Kim, Hong koo, Li, Cheng Chung, Fang, Xiao Ming, Solomon, James, Nykolak, Gerald, Becker, Philippe C. MRS - Materials Research Society
5 国際会議録 Enhancement of Photoluminescence And Microstructure of Undoped ZnO Thin Film Growth on Al2O3 (0001) Substrate by rf Magnetron Sputtering Cho, I., Yoon, K.H., Oh, M.S., Choi, W.K Electrochemical Society	11 国際会議録 Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target Yao, Pin Chuan, Hang, Shih Tse, Wu, Menq Jiun Trans Tech Publications
6 国際会議録 Influence of substrates on photoluminescence for ZnO films prepared by rf sputtering Wang, Q.P., Zhang, D.H., Xue, Z.Y., Ma, J. SPIE-The International Society for Optical Engineering	12 国際会議録 Growth Conditions Effect on the Structure and Optical Properties of ZnO Thin Films Synthesized by rf magnetron Sputtering Luis Angelats-Silva, Maharaj S. Tomar, Oscar Perales-Perez, Segundo R. Jauregui-Rosas, S. P. Singh Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12