Annealing Behavior Of Locally Confined Dislocation Loops Under Inert And Oxidizing Ambient
- 著者名:
Tsamis, C. Skarlatos, D. Raptis, I. Tsoukalas, D. Calvo, P. Colombeau, B. Cristiano, F. Claverie, A. - 掲載資料名:
- Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 717
- 発行年:
- 2002
- 開始ページ:
- 243
- 終了ページ:
- 248
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996533 [1558996532]
- 言語:
- 英語
- 請求記号:
- M23500/717
- 資料種別:
- 国際会議録
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