Optimization of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm Cmos
- 著者名:
- 掲載資料名:
- Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 717
- 発行年:
- 2002
- 開始ページ:
- 65
- 終了ページ:
- 76
- 総ページ数:
- 12
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996533 [1558996532]
- 言語:
- 英語
- 請求記号:
- M23500/717
- 資料種別:
- 国際会議録
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11
国際会議録
Linewidth Dependence Of The Reverse Bias Junction Leakage For Co-Silicided Source/Drain Junctions
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Electrochemical Society |
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