Thin Film Microelectromechanical Systems

Thin Film Microelectromechanical Systems

著者名:

掲載資料名:

Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

715

発行年:

2002

開始ページ:

745

終了ページ:

756

総ページ数:

12

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996519 [1558996516]

言語:

英語

請求記号:

M23500/715

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014588
シリーズID:	PA00000011
会議名:	Symposium on amorphous and heterogeneous silicon-based films
回次:	2002
会議開催地:	San Francisco, CA, USA
会議開催年:	2002.04.02-2002.04.05

類似資料:

1 国際会議録 Performance of Thin-Film Silicon MEMS Resonators in Vacuum Gaspar, J., Chu, V., Conde, J. P. Materials Research Society	7 国際会議録 Thin-Film Transistors On Pet At 100 CircC Conde, J.P., Alpuim, P., Chu, V. Materials Research Society
2 国際会議録 Thin-Film Electrostatic Actuators on Flexible Plastic Substrates Gaspar, J., Chu, V., Conde, J. P. Materials Research Society	8 国際会議録 Thin Film Amorphous Silicon Bulk-Mode Disk Resonators Fabricated on Glass Substrates A. Gualdino, V. Chu, J.P. Conde Materials Research Society
3 国際会議録 Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates Gaspar, J., Chu, V., Conde, J. P. Materials Research Society	9 国際会議録 MEMS Microresonators Based on Nanocrystalline Silicon Gaspar, J., Adrega, T., Chu, V., Conde, J.P. Materials Research Society
4 国際会議録 Thin Film Silicon Microbridges for DNA Detection. Adrega, T., Gaspar, J., Fixe, F., Chu, V., Prazeres, D.M.F., Conde, J.P. Materials Research Society	10 国際会議録 Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures Gaspar, J., Boucinha, M., Chu, V., Conde, J.P. Materials Research Society
5 国際会議録 Integrated Magnetic Sensing Of Electrostatically Actuated Thin Film Microbridges Gaspar, J., Li, Haohua, Freitas, P.P., Chu, V., Conde, J.P. Materials Research Society	11 国際会議録 Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates P.M. Sousa, V. Chu, J.P. Conde Materials Research Society
6 国際会議録 Low Temperature Thin-Film Microelectromechanical Devices On Plastic Substrates Alpuim, P., Boucinha, M., Brogueira, P., Chu, V., Conde, J. P. Materials Research Society	12 国際会議録 Application of Thin-Film Micromachining on Glass Boucinha, M., Chu, V., Conde, J. P. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12