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Hydrogenated Amorphous Silicon With High Growth Rate, Gas Utilisation And Homogeneous Deposition By Amplitude Modulated Vhf-Pecvd For Solar Cell Application

著者名:
Rath, J.K.
Biebericher, A.C.W.
Zambrano, R. Jimenez
Schropp, R.E.I.
Weg, W.F. Van der
Goedheer, W.J.
さらに 1 件
掲載資料名:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
715
発行年:
2002
開始ページ:
577
終了ページ:
582
総ページ数:
6
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996519 [1558996516]
言語:
英語
請求記号:
M23500/715
資料種別:
国際会議録

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