Characteristics of Cr-Al-N-O Thin Films Prepared by Pulsed Laser Deposition
- 著者名:
Hirai, Makoto Saito, Hajime Suzuki, Tsuneo Suematsu, Hisayuki Jiang, Weihua Yatsui, Kiyoshi - 掲載資料名:
- Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 697
- 発行年:
- 2002
- 開始ページ:
- 255
- 終了ページ:
- 260
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Penn: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996335 [1558996338]
- 言語:
- 英語
- 請求記号:
- M23500/697
- 資料種別:
- 国際会議録
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3
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Characteristics of Polycrystalline Silicon Thin Films Prepared By Pulsed Ion-Beam Evaporation
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