Mechanical Properties and Porosity of Organo-silicate Glass (OSG) Low-k Dielectric Films

Mechanical Properties and Porosity of Organo-silicate Glass (OSG) Low-k Dielectric Films

著者名:

掲載資料名:

Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

695

発行年:

2002

開始ページ:

309

終了ページ:

316

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996311 [1558996311]

言語:

英語

請求記号:

M23500/695

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014570
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	9th
会議開催地:	Boston, MA, USA
会議開催年:	2001.11.26-2001.11.30

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