Texture of Sputtered Thin Copper Films on Amorphous SiO2 and Si3N4 Substrates

Texture of Sputtered Thin Copper Films on Amorphous SiO2 and Si3N4 Substrates

著者名:

掲載資料名:

Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

695

発行年:

2002

開始ページ:

59

終了ページ:

64

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996311 [1558996311]

言語:

英語

請求記号:

M23500/695

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014570
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	9th
会議開催地:	Boston, MA, USA
会議開催年:	2001.11.26-2001.11.30

類似資料:

1 国際会議録 Changes in Stress and Microstructure in Sputter Deposited Copper Films Due to Substrate Surface Effects Okolo, B., Lamparter, P., Welzel, U., Wagner, T., Mittemeijer, E.J. Trans Tech Publications	7 国際会議録 Interdiffusion and Stress Development in Thin Film Diffusion Couples Kuru, Y., Chakraborty, J., Welzel, U., Wohlschlogel, M., Mittemeijer, E.J. Trans Tech Publications
2 国際会議録 Direction Dependent Grain-Interaction Models for the Diffraction Stress Analysis of Thin Films Welzel, Udo, Leoni, Matteo, Mittemeijer, Eric J. Materials Research Society	8 国際会議録 Mechanical Stress Gradients in Thin Films Analyzed Employing X-Ray Diffraction Measurements at Constant Penetration/Information Depths Wohlschlogel, M., Baumann, W., Welzel, U., Mittemeijer, E.J. Trans Tech Publications
3 国際会議録 Stress in Thin Layers; Grain Interaction, Elastic Constants and Diffraction Response Kamminga, J. -D., Leoni, M., Welzel, U., Lamparter, P., Mittemeijer, E. J. Trans Tech Publications	9 国際会議録 Study of Interface Formation of (Ba,Sr)TiO3 Thin Films Grown by rf Sputter Deposition on Bare Si and Thermal SiO2/Si Substrates Suvorova, N. A., Mueller, A. H., Suvorova, A. A., Saunders, M., Irene, E. A. Materials Research Society
4 国際会議録 Stress and Diffusion in Nb-W Bilayers Welzel, U., Lamparter, P., Leoni, M., Mittemeijer, E. J. Trans Tech Publications	10 国際会議録 Study of Interface Formation of (Ba,Sr)TiO3 Thin Films Grown by RF Sputter Deposition on Bare Si and Thermal SiO2/Si Substrates Suvorova, N.A., Mueller, A.H., Suvorova, A.A., Saunders, M., Irene, E.A. Materials Research Society
5 国際会議録 Applicability of the Crystallite Group Method to Fibre Textured Specimens Welzel, U., Mittemeijer, E.J. Trans Tech Publications	11 国際会議録 Materials Compatibility between Si/SiO2 Substrates and BaTiO3 Thin Films Caballero, J. V., Fuenzalida, V. M., Avila, R., Eisele, I. MRS - Materials Research Society
6 国際会議録 X-ray Diffraction and Reflectometry Investigation of Interdiffusion in Sputtered Niobium-Tungsten Bilayers Lamparter, P., Mittemeijery, E. J., Welzel, U. Materials Research Society	12 国際会議録 Optical Nonlinearity of Sputtered Co3O4-SiO2-TiO2 Thin Films Yamamoto, Hiroki, Naito, Takashi, Hirao, Kazuyuki Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12