Doping Profiles of n-Type GaAs Layers Grown on Si by the Conformal Method

Doping Profiles of n-Type GaAs Layers Grown on Si by the Conformal Method

著者名:

Ardila, Angel M.

掲載資料名:

Progress in semiconductor materials for optoelectronic applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

692

発行年:

2002

開始ページ:

417

終了ページ:

422

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996281 [1558996281]

言語:

英語

請求記号:

M23500/692

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014568
シリーズID:	PA00000011
会議名:	Symposium on progress in semiconductor materials for optoelectronic applications
回次:	2001
会議開催地:	Boston, MA, USA
会議開催年:	2001.11.26-2001.11.29

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