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Positron Annihilation Lifetime Spectroscopy (PALS) Application in Metal Barrier Layer Integrity for Porous Low-k Materials

著者名:
Lin, Simon
Sun, Jia-Ning
Gidley, David W.
Wetzel, Jeffrey T.
Monnig, K.A.
Ryan, E. Todd
Jang, Simon
Yu, Douglas
Liang, M.S.
さらに 4 件
掲載資料名:
Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
686
発行年:
2002
開始ページ:
229
終了ページ:
234
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996229 [1558996222]
言語:
英語
請求記号:
M23500/686
資料種別:
国際会議録

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