Electrical Properties of Ultra Shallow p Junction on n Type Si Wafer Using Decaborane Ion Implantation
- 著者名:
- 掲載資料名:
- Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 686
- 発行年:
- 2002
- 開始ページ:
- 95
- 終了ページ:
- 100
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996229 [1558996222]
- 言語:
- 英語
- 請求記号:
- M23500/686
- 資料種別:
- 国際会議録
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