Preparation and Properties of Amorphous Carbon Oxynitrides a-CNxOy Films Made by a Nitrogen Radical Sputter Method and by the Layer-by-Layer Method

Preparation and Properties of Amorphous Carbon Oxynitrides a-CNxOy Films Made by a Nitrogen Radical Sputter Method and by the Layer-by-Layer Method

著者名:

掲載資料名:

Nanotubes, fullerenes, nanostructures and disordered carbon : symposium held April 17-20, 2001, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

675

発行年:

2001

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996113 [1558996117]

言語:

英語

請求記号:

M23500/675

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014558
シリーズID:	PA00000011
会議名:	Symposium On Nanotubes, Fullerenes, Nanostructures and Disordered Carbon
回次:	2001
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.04.17-2001.04.20

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