Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications
- 著者名:
Chu, Karen Cho, Byeong-Ok Chang, Jane P. Steigerwald, Mike L. Fleming, Robert M. Opila, Robert L. Lang, Dave V. Dover, R. Bruce Van Jones, Chris D.W. - 掲載資料名:
- Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 672
- 発行年:
- 2001
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996083 [1558996087]
- 言語:
- 英語
- 請求記号:
- M23500/672
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
American Institute of Chemical Engineers |
MRS-Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
10
国際会議録
641e. Erbium And Ytterbium Doped Yttrium Oxide Nanostructures For Optical Amplifier Application
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
American Institute of Chemical Engineers |
Materials Research Society |