Structural and Optical Features Of Nanocrystalline Silicon Films Prepared By PECVD and rf Magnetron Sputter Techniques

Structural and Optical Features Of Nanocrystalline Silicon Films Prepared By PECVD and rf Magnetron Sputter Techniques

著者名:

掲載資料名:

Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

664

発行年:

2001

総ページ数:

6

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996007 [1558996001]

言語:

英語

請求記号:

M23500/664

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014547
シリーズID:	PA00000011
会議名:	Symposium on amorphous and heterogeneous silicon-based films
回次:	2001
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.04.16-2001.04.20

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