Radical Species Distributions in Hot-Wire Chemical Vapor Deposition Probed Via Threshold Ionization Mass Spectrometry and Direct Simulation Monte Carlo Techniques

Radical Species Distributions in Hot-Wire Chemical Vapor Deposition Probed Via Threshold Ionization Mass Spectrometry and Direct Simulation Monte Carlo Techniques

著者名:

Holt, Jason K.

掲載資料名:

Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

664

発行年:

2001

総ページ数:

6

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996007 [1558996001]

言語:

英語

請求記号:

M23500/664

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014547
シリーズID:	PA00000011
会議名:	Symposium on amorphous and heterogeneous silicon-based films
回次:	2001
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.04.16-2001.04.20

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2 国際会議録 High Hydrogen Content Silicon Nitride For Photovoltaic Applications Deposited By Hot-Wire Chemical Vapor Deposition Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A. Materials Research Society	8 国際会議録 Quantitative Modelling of Nucleation Kinetics in Experiments for Poly-Si Growth on SiO 2 by Hot-Wire Chemical Vapor Deposition Swiatek, M, Holt, J.K., Atwater, H.A. Electrochemical Society
3 国際会議録 Quantitative Modeling of Nucleation Kinetics in Experiments For Poly-Si Growth on SiO2 By Hot-Wire Chemical Vapor Deposition Swiatek, Maribeth, Holt, Jason K., Atwater, Harry A. Materials Research Society	9 国際会議録 Si + SiH4 Reactions And Implications For Hot Wire CVD Of a-Si:H: Computational Studies GoddardIII, W. A., Goodwin, D. G., Holt, J. K., Muller, R. P. Materials Research Society
4 国際会議録 Gas Phase and Surface Kinetic Processes in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition Holt, J.K., Swiatek, M., Goodwin, D.G., Atwater, H.A., Muller, R.P., Goddard, W.A., III Electrochemical Society	10 国際会議録 A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices Richardson, Christine Esber, Kayes, Brendan M., Dicken, Matthew J., Atwater, Harry A. Materials Research Society
5 国際会議録 Gas Phase And Surface Kinetic Processes In Hot-Wire Chemical Vapor Deposition Atwater, H. A., Goodwin, D. G., Holt, J. K., Swiatek, M. Materials Research Society	11 国際会議録 Simulation of Hot-Wire Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Goodwin, D.G. Electrochemical Society
6 国際会議録 A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A. Materials Research Society	12 国際会議録 A Numerical Model for Hot-Wire Chemical Vapor Deposition of Amorphous Silicon .. Goodwin, D. G. Materials Research Society

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