Blank Cover Image

Young's Modulus and Fracture Strength of Three Polysilicons

著者名:
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
657
発行年:
2001
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
言語:
英語
請求記号:
M23500/657
資料種別:
国際会議録

類似資料:

1 国際会議録 Fracture Strength of Polysilicon Thin Films at Stress Concentrations

Bagdahn, J., Sharpe, W.N. Jr.

Materials Research Society
7 国際会議録 Microtensile Testing of Nanocrystalline Al/Zr Alloys

Legros, M., Hemker, K. J., LaVan, D. A., Sharpe, W. N., Jr., Rittner, M. N., Weertman, J. R.

MRS - Materials Research Society
2 国際会議録 Round-Robin Tests of Modulus and Strength of Polysilicon

Sharpe, W. N., Jr., Brown, S., Johnson, G. C., Knauss, W.

MRS - Materials Research Society
8 国際会議録 Polysilicon Tensile Testing With Electrostatic Gripping

Sharpe, W. N., Jr., Turner, K., Edwards, R. L.

MRS - Materials Research Society
3 国際会議録 Fracture Tests of Polysilicon Film

Sharpe, W. N., Jr., Yuan, B., Edwards, R. L.

MRS - Materials Research Society
9 国際会議録 Fracture toughness and fatigue investigations of polycrystalline silicon

Bagdahn,J., Schischka,J., Petzold,M., Sharpe Jr.,W.N.

SPIE-The International Society for Optical Engineering
4 国際会議録 Strength of polysilicon for MEMS devices

LaVan,D.A., Buchheit,T.E.

SPIE - The International Society for Optical Engineering
10 国際会議録 Mechanical Testing of Free-Standing Thin Films

Sharpe, W.N. Jr.,, Hemker, K.J.

Materials Research Society
5 国際会議録 High Temperature Behavior of Polysilicon

Oh, Chung-Seog, Coles, George, Sharpe Jr., William N.

Materials Research Society
11 国際会議録 Mechanical Properties of SU-8

Edwards, R.L., Sharpe, W.N., Coles, G., McAleavey, A.

Materials Research Society
6 国際会議録 On the Role of the Underlying Microstructure on the Mechanical Properties of Microelectromechanical Systems (MEMS) Materials

Dirras, G.F., Coles, G., Wagner, A.J, Carlo, stephen, Newman, C., Hemker, K.J., Sharpe, W.N., Jr., Carlo, S.

Materials Research Society
12 国際会議録 Tensile properties of LIGA nickel

Sharpe,W.N.,Jr., McAleavey,A.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12