Microstructure and Mechanical Properties of Electroplated Cu Thin Films
- 著者名:
Voinsky, A.A. Vella, J. Adhihetty, I.S. Sarihan, V. Mercado, L. Yeung, B.H. Gerberich, W.W. - 掲載資料名:
- Fundamentals of nanoindentation and nanotribology II : symposium held November 28-30, 2000, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 649
- 発行年:
- 2001
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Penn.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995598 [1558995595]
- 言語:
- 英語
- 請求記号:
- M23500/649
- 資料種別:
- 国際会議録
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