Low Temperature Tungsten, Tungsten Carbide, and Tantalum Carbide Film Growth
- 著者名:
Sun, Y.-M. Lee, S.Y. Engbrecht, E.R. Pfeifer, K. Smith, S. White, J.M. Ekerdt, J.G. - 掲載資料名:
- Growth, evolution and properties of surfaces, thin films and self-organized structures : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 648
- 発行年:
- 2001
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995581 [1558995587]
- 言語:
- 英語
- 請求記号:
- M23500/648
- 資料種別:
- 国際会議録
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