Structural Defects in Ion Implanted 4H-SiC Epilayers

Structural Defects in Ion Implanted 4H-SiC Epilayers

著者名:

Persson, P.O.Å.

掲載資料名:

Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

640

発行年:

2001

総ページ数:

5

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995505 [1558995501]

言語:

英語

請求記号:

M23500/640

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014527
シリーズID:	PA00000011
会議名:	Symposium on silicon carbide-materials
回次:	2000
会議開催地:	Boston, MA, USA
会議開催年:	2000.11.27-2000.11.29

類似資料:

1 国際会議録 Damage Evolution in Al-implanted 4H SiC Hallen, A., Persson, P. O. A., Kuznetsov, A. Yu., Hultman, L., Svensson, B. G. Trans Tech Publications	7 国際会議録 Structural Defects in Electrically Degraded 4H-SiC PiN Diodes Persson, P.O.A., Jacobson, H., Molina-Aldareguia, J.M., Bergman, J.P., Tuomi, T., Clegg, W.J., Janzen, E., Hultman, L. Trans Tech Publications
2 国際会議録 Growth Evolution of Dislocation Loops in Ion Implanted 4H-SiC Persson, P.O.A., Hultman, L. Trans Tech Publications	8 国際会議録 High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing Panknin, D., Wirth, H., Anwand, W., Brauer, G., Skorupa, W. Trans Tech Publications
3 国際会議録 Raman scattering analysis of defects in 6H-SiC induced by ion implantation Perez-Rodriguez,A., Gonzalez-Varona,O., Calvo-Barrio,L., Morante,J.R., Wirth,H., Panknin,D., Skorupa,W. Trans Tech Publications	9 国際会議録 Electron Irradiation of 4H SiC by TEM: An Optical Study Sridhara, S.G., Persson, P.O.Å., Carlsson, F.H.C., Bergman, J.P., Janzen, E., Evans, G., Steeds, J.W. Materials Research Society
4 国際会議録 Doping of Silicon Carbide by Ion Implantation Svensson, B.G., Hallen, A., Linnarsson, M.K., Kuznetsov, A.Yu., Janson, M.S, Aberg, D., Oesterman, J., Persson, P.O.A., … Trans Tech Publications	10 国際会議録 Techniques for Depth Profiling of Dopants in 4H-SiC Oesterman, J., Hallen, A., Anand, S., Linnarsson, M.K., Andersson, H., Aberg, D., Panknin, D., Skorupa, W. Trans Tech Publications
5 国際会議録 Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour Anwand, W., Brauer, G., Panknin, D., Skorupa, W. Trans Tech Publications	11 国際会議録 FORMATION OF CoSi2 WIRES BY MASKLESS IMPLANTATION WITH THE FOCUSED ION BEAM Teichert, J., Bischoff, L., Hesse, E., Panknin, D., Skorupa, W. MRS - Materials Research Society
6 国際会議録 Structural Defects in Electrically Degraded 4H-SiC PiN Diodes Persson, P.O.A., Jacobson, H., Molina-Aldareguia, J.M., Bergman, J.P., Tuomi, T., Clegg, W.J., Janzen, E., Hultman, L. Trans Tech Publications	12 国際会議録 FORMATION OF CoSi2 WIRES BY MASKLESS IMPLANTATION WITH THE FOCUSED ION BEAM Teichert, J., Bischoff, L., Hesse, E., Panknin, D., Skorupa, W. MRS - Materials Research Society

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