Formation and Transition of Defects in Erbium/Oxygen Implanted Silicon

Formation and Transition of Defects in Erbium/Oxygen Implanted Silicon

著者名:

掲載資料名:

Microphotonics--materials, physics and applications : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

637

発行年:

2001

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995475 [1558995471]

言語:

英語

請求記号:

M23500/637

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014524
シリーズID:	PA00000011
会議名:	Symposium on microphotonics
回次:	2000
会議開催地:	Boston, MA, USA
会議開催年:	2000.11.27-2000.11.29

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