μ-Raman Spectra Analysis of the Evolution of Hydrogen Related Defects and Void Formation in the Silicon Ion-Cut Process

μ-Raman Spectra Analysis of the Evolution of Hydrogen Related Defects and Void Formation in the Silicon Ion-Cut Process

著者名:

Dungen, W.

掲載資料名:

Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

864

発行年:

2005

開始ページ:

503

終了ページ:

508

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998179 [1558998179]

言語:

英語

請求記号:

M23500/864

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014508
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2005
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2005.03.28-2005.04.01

類似資料:

1 国際会議録 Void Formation in Hydrogen Implanted and Subsequently Plasma Hydrogenated and Annealed Czochralski Silicon Job, R., Dungen, W., Ma, Y., Huang, Y.L., Horstmann, J.T. Materials Research Society	7 国際会議録 Hydrogen Diffusion Characterized by Hydrogen Enhanced Thermal Donor Formation in p-Type Czochralski Silicon at Temperatures Between 350 and 450℃ Huang, Y.L., Ma, Y., Job, R., Fahmer, W.R. Electrochemical Society
2 国際会議録 Thermal Evolution of Hydrogen Related Defects in Silicon Investigated by u-Raman Spectroscopy Ma, Y., Huang, Y.L., Job, R., Fahrner, W.R., Beaufort, M.-F., Barbot, J. -F. Electrochemical Society	8 国際会議録 On the Formation Kinetics of Thin Nanopatterned Layers on Silicon Wafers Created by Hydrogen Plasma Exposure Job, R., Huang, Y. L., Ma, Y., Zolgert, B., Dungen, W. Materials Research Society
3 国際会議録 Hydrogen Gettering and Platelet Formation in Implanted and Hydrogenated Silicon A. Job, W. Düngen, Y. Ma, W. R. Fahrner, L. O. Keller, J. T. Horstmann, H. Fiedler Electrochemical Society	9 国際会議録 Control of Stress in Surface Engineered Silicon Ma, Y., Job, R., Zolgert, B., Dungen, W., Huang, Y. L., Fahrner, W. R. Materials Research Society
4 国際会議録 Micro-Raman Analysis of Hydrogen Related Defects in Czochralski Silicon (Invited) Job, R., Dungen, W., Ma, Y., Huang, Y. L. Electrochemical Society	10 国際会議録 Comparative Raman And Tem Analysis Of The Evolution Of Platelet Defects In Plasma Hydrogenated And Annealed Czochralski Silicon Job, R., Beaufort, M.-F., Barbot, J.-F., Ulyashin, A.G., Fahrner, W.R. Materials Research Society
5 国際会議録 P-N Junction Diodes Fabricated Based on Donor Formation in Plasma Hydrogenated P-Type Czochralski Silicon Huang, Y.L., Simoen, E., Job, R., Claeys, C., Dungen, W., Ma, Y., Fahrner, W.R., Versluys, J., Clauws, P. Materials Research Society	11 国際会議録 Hydrogen Enhanced Thermal Donor Formation in p-Type Czochralski Silicon with a Denuded Zone Ulyashin, U.G., Petlitskii, A.N., Job, R., Fahrner, W.R. Electrochemical Society
6 国際会議録 From Smart-Cut to Soft-Cut: Mechanisms of Hydrogen Plasma Supported Layer Exfoliation in Silicon R. Job, W. Düngen, Y. Ma, J. T. Horstmann Electrochemical Society	12 国際会議録 Formation of Hydrogen Related Defects and Nano-Voids in Plasma Hydrogenated ZnO Reinhart Job Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12