Integration of ALD-TaN Liners on Nanoporous Dielectrics
- 著者名:
- 掲載資料名:
- Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 863
- 発行年:
- 2005
- 開始ページ:
- 221
- 終了ページ:
- 226
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998162 [1558998160]
- 言語:
- 英語
- 請求記号:
- M23500/863
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
American Chemical Society |
Materials Research Society |
8
国際会議録
IN-SITU ANNEALING TRANSMISSION ELECTRON MICROSCOPY (TEM) STUDY OF THE Ti/GaAs INTERFACIAL REACTIONS
Materials Research Society |
American Chemical Society |
MRS - Materials Research Society |
American Chemical Society |
Materials Research Society |
American Chemical Society |
MRS - Materials Research Society |
American Chemical Society |
American Society of Mechanical Engineers |