Structural and Electronic Properties of Hydrogenated Nanocrystalline Silicon Films Made with Hydrogen Dilution Profiling Technique

Structural and Electronic Properties of Hydrogenated Nanocrystalline Silicon Films Made with Hydrogen Dilution Profiling Technique

著者名:

Wang, Keda

掲載資料名:

Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

862

発行年:

2005

開始ページ:

117

終了ページ:

122

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998155 [1558998152]

言語:

英語

請求記号:

M23500/862

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014506
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2005
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2005.03.28-2005.04.01

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