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Simultaneous Effects on Topography, Composition and Texture in Ion Assisted Deposition of Thin Films

著者名:
Harper, James M. E.  
掲載資料名:
Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
843
発行年:
2005
開始ページ:
169
終了ページ:
176
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997912 [1558997911]
言語:
英語
請求記号:
M23500/843
資料種別:
国際会議録

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