Effect of Deposition Temperature and Post-Heat-Treatment Conditions on the Characteristics of (100)-Self-Orientation LaNiO3 Films Prepared by RF Magnetron Sputter Deposition

Effect of Deposition Temperature and Post-Heat-Treatment Conditions on the Characteristics of (100)-Self-Orientation LaNiO3 Films Prepared by RF Magnetron Sputter Deposition

著者名:

掲載資料名:

Materials, integration and packaging issues for high-frequency devices

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

833

発行年:

2004

開始ページ:

35

終了ページ:

40

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997813 [1558997814]

言語:

英語

請求記号:

M23500/833

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014487
シリーズID:	PA00000011
会議名:	Materials, integration and packaging issues for high-frequency devices ; MRS Fall Meeting
回次:	2nd ; 2004
会議開催地:	Boston, MA,USA
会議開催年:	2004.11.29-2004.12.03

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