Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films

Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films

著者名:

掲載資料名:

Nanoscale materials and modeling -- relations among processing, microstructure and mechanical properties : symposium held April 13-16, 2004, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

821

発行年:

2004

開始ページ:

331

終了ページ:

336

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997714 [1558997717]

言語:

英語

請求記号:

M23500/821

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014478
シリーズID:	PA00000011
会議名:	Symposium on nanoscale materials and modeling
回次:	2004
会議開催地:	San Francisco, CA, USA
会議開催年:	2004.04.13-2004.04.16

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