Fabrication of Nanotips and Microbeams in Antimonide Based Semiconductor Material Using Bromine Ion Beam Assisted Etching

Fabrication of Nanotips and Microbeams in Antimonide Based Semiconductor Material Using Bromine Ion Beam Assisted Etching

著者名:

Krejca, B.

掲載資料名:

Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

792

発行年:

2004

開始ページ:

309

終了ページ:

314

総ページ数:

6

出版情報:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558997301 [155899730X]

言語:

英語

請求記号:

M23500/792

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014464
シリーズID:	PA00000011
会議名:	Symposium on radiation effects and ion-beam processing of materials
回次:	2003
会議開催地:	Boston, MA, USA
会議開催年:	2003.12.01-2003.12.05

類似資料:

1 国際会議録 Preparation and Patterning of GaSb Surfaces With Br-IBAE for Antimonide Based Molecular Beam Epitaxy Vangala, S.R., Krejca, B., Kristmaswami, K., Dauplaise, H., Qian, X., Zhu, B., Ospina, M., Sung, C., Vaccaro, K., Bliss, … Materials Research Society	7 国際会議録 Unique Capabilities of Chemically-Assisted Ion-Beam Etching for Compound Semiconductor Devices Vawter, G. A., Alford, C. Electrochemical Society
2 国際会議録 Gas Cluster Ion Beam Processing of GaSb and InSb Surfaces Krishnaswami, K., Vangala, S.R., Krejca, B., Allen, L.P., Santeufemio, C., Dauplaise, H., Liu, X., Whitten, J., Ospina, … Materials Research Society	8 国際会議録 Characterization of chemically assisted ion beam etching and form birefringence structure fabrication in GaAs using SU-8 Pang, L., Nezhad, M., Levy, U., Tsai, C., Fainman, Y. SPIE - The International Society of Optical Engineering
3 国際会議録 Micromechanical Characterization of GaSb by Microbeam Deflection and Using Nanoprobe and Finite Element Analysis Ospina, M., Vangala, S. R., Yang, D., Sherwood, J. A., Sung, C., Goodhue, W. D. Materials Research Society	9 国際会議録 ION/NEUTRAL BEAM ASSISTED ETCHING OF SEMICONDUCTORS: CHEMICAL MODIFICATIONS OF THE ADSORBED PHASE Tyrrell, Glenn C., Marshall Duncan, Jackman, Richard B. Materials Research Society
4 国際会議録 Determination of Nano Fluctuations in Surface Oxides of GaSb With Br-IBAE Krishnaswami, K., Krejca, B., Vangala, S. R., Santeufemio, C., Allen, L. P., Ospina, M., Liu, X., Sung, C., Vaccaro, K., … Materials Research Society	10 国際会議録 Comparative study of surface-plasma enhanced grating-coupled detectors Krishnaswami,K., Tremblay,R.J., Goodhue,W.D., Karakashian,A.S. SPIE-The International Society for Optical Engineering
5 国際会議録 Roughness Analysis of Ion Beam Processed GaSb and InSb Surfaces Krishnaswami, K., Fenner, D. B., Vangala, S. R., Santeufemio, C., Grzesik, M., Allen, L. P., Dallas, G., Goodhue, W. D. Materials Research Society	11 国際会議録 MeV ION BEAM APPLICATIONS IN III-V SEMICONDUCTORS Elliman, R.G., Ridgway, M.C., Johnson, S.T., Williams, J.S. Materials Research Society
6 国際会議録 Successful MWIR FPA fabrication using gas cluster ion-beam InSb surface finishing L. P. Allen, G. Dallas, K. Blanchet, S. R. Vangala, C. Santeufemio, W. D. Goodhue, E. Roehl, C. E. Jones, J. Barton, B. … SPIE - The International Society of Optical Engineering	12 国際会議録 Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates Haji-Saeed, B., Kolluru, R., Pyburn, D., Leon, R., Sengupta, S.K., Testorf, M.E., Goodhue, W.D., Khoury, J., Drehman, … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12