Highly Reliable Metal Gate nMOSFETs by Improved CVD-WSix Films With Work Function of 4.3eV
- 著者名:
Nakajima, Kazuaki Nakazawa, Hiroshi Sekine, Katsuyuki Matsuo, Kouji Saito, Tomohiro Katata, Tomio Suguro, Kyoichi Tsunashima, Yoshitaka - 掲載資料名:
- Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 811
- 発行年:
- 2004
- 開始ページ:
- 149
- 終了ページ:
- 154
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997615 [155899761X]
- 言語:
- 英語
- 請求記号:
- M23500/811
- 資料種別:
- 国際会議録
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