Effects of Annealing on the Mechanical and Electrical Properties of DC Sputtered Tantalum Pentoxide (Ta2O5) Thin Films

Effects of Annealing on the Mechanical and Electrical Properties of DC Sputtered Tantalum Pentoxide (Ta2O5) Thin Films

著者名:

掲載資料名:

Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

811

発行年:

2004

開始ページ:

63

終了ページ:

68

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997615 [155899761X]

言語:

英語

請求記号:

M23500/811

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014453
シリーズID:	PA00000011
会議名:	Symposium on integration of advanced micro- and nanoelectronic devices
回次:	2004
会議開催地:	San Francisco, CA, USA
会議開催年:	2004.04.13-2004.04.16

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