Solid Phase Epitaxy Process Integration on 50 nm PMOS Devices : Effects of Defects on Chemical and Electrical Characteristics of Ultra-Shallow Junctions
- 著者名:
El-Farhane, R. Laviron, C. Cristiano, F. Cherkashin, N. Morin, P. Juhel, M. Stolk, P. Arnaud, F. Pouydebasque, A. Wacquant, F. Lenoble, D. Halimaoui, A. - 掲載資料名:
- Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 810
- 発行年:
- 2004
- 開始ページ:
- 21
- 終了ページ:
- 30
- 総ページ数:
- 10
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997608 [1558997601]
- 言語:
- 英語
- 請求記号:
- M23500/810
- 資料種別:
- 国際会議録
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