Stress Metrology : The Challenge for the Next Generation of Engineered Wafers
- 著者名:
Tiberi, Antoine Paillard, Vincent Aulnette, Cecile Daval, Nicolas Bourdelle, Konstantin K. Moreau, Myriam Kennard, Mark Cayrefourcq, Ian - 掲載資料名:
- High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 809
- 発行年:
- 2004
- 開始ページ:
- 97
- 終了ページ:
- 102
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997592 [1558997598]
- 言語:
- 英語
- 請求記号:
- M23500/809
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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5
国際会議録
Wafer-Level Stress in Combination with Process Induced Stress for Optimum Performance Enhancement
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |