Blank Cover Image

Influence of He Implantation Conditions on Strain Relaxation and Threading Dislocation Density in Si0.8Ge0-2 Virtual Substrates

著者名:
Cai, J.
Mooney, P.M.
Christiansen, S.H.
Chen, H.
Chu, J.O.
Ott, J.A.
さらに 1 件
掲載資料名:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
809
発行年:
2004
開始ページ:
51
終了ページ:
56
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997592 [1558997598]
言語:
英語
請求記号:
M23500/809
資料種別:
国際会議録

類似資料:

1 国際会議録 Strain Relaxation Mechanisms in He+-Implanted and Annealed Si1-xGex Layers on Si(001) Substrates

Christiansen, S.H., Mooney, P.M., Chu, J.O., Grill, A.

Materials Research Society
7 国際会議録 Silicon-On-Sapphire Technology: QUO VADIS II. A Competitive Alternative for RF Systems

Lagnado, I., de Ia Houssaye, P.R., Koester, S.J., Hammond, R., Chu, J.O., Ott, J.A., Mooney, P.M., Perraud, L., Jenkins, …

Electrochemical Society
2 国際会議録 STRAIN-FREE GexSi1-x LAYERS WITH LOW THREADING DISLOCATION DENSITIES GROWN ON Si SUBSTRATES

Fitzgerald, E.A., Xie, Y.H., Green, M.L., Brasen, D., Kortan, A.R., Mii, Y.J., Michel, J., Weir, B.E., Feldman, L.C., …

Materials Research Society
8 国際会議録 Study of strain relaxation in epitaxial structure Ge0.2Si0.8/Si at thermo-implantation treatment by ion beam channeling

Vyatkin, A. F., Egorov, V. K., Egorov, E. V.

MRS-Materials Research Society
3 国際会議録 Dislocation-Related Photoluminescence in Strain-Relaxed Si1-xGex Buffer Layer Structures

Shum, Kai, Mooney, P. M., Chu, J. O.

MRS - Materials Research Society
9 国際会議録 ROLE OF DISLOCATION INTERACTIONS IN DECREASING MOBILE THREADING DISLOCATION DENSITY AND LIMITING STRAIN RELAXATION IN Si1-xGex HETEROEPITAXIAL FILMS

Gillard, Veronique T., Nix, William D.

MRS - Materials Research Society
4 国際会議録 DEPENDENCE OF THREADING DISLOCATION DENSITY ON SUBSTRATE MISORIENTATION In0.15Ga0.85AS GROWN ON GaAs(100)

Uppal, P. N., Aheam, J. S., Herring,. R.

Materials Research Society
10 国際会議録 Misfit Dislocations and Elastic Relaxation

Strunk, H. P., Christiansen, S., Albrecht, M.

MRS - Materials Research Society
5 国際会議録 Strained Si-on-Insulator Fabricated From Elastically-Relaxed Si/SiGe Structures

Mooney, P.M., Cohen, G.M., Chen, H., Chu, J.O., Klymko, N.

Materials Research Society
11 国際会議録 Improved critical dimension control in 0.8-NA Laser reticle writers

Hamaker,H.C., Valetin,G.E., Martyniuk,J., Martinez,B.G., Pochkowski,J.M., Hodgson,L.D.

SPIE - The International Society for Optical Engineering
6 国際会議録 Thermal Stability of Strained Si on Relaxed Si1-xGex Buffer Layers

Mooney, P.M., Koester, S.J., Ott, J.A., Jordan-Sweet, J.L., Chu, J.O., Chan, K.K.

Materials Research Society
12 テクニカルペーパー Low Temperature Creep of a Titanium Alloy Ti-6Al-2Cb-1Ta-0.8Mo

Chu, H. P.

National Aeronautics and Space Adminstration
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12