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Metastability in Undoped Microcrystalline Silicon Thin Films Deposited by HWCVD

著者名:
Persheyev, S.K.
O'Neill, K.A.
Anthony, S.
Rose, M.J.
Smirnov, V.
Reynolds, S.
さらに 1 件
掲載資料名:
Amorphous and nanocrystalline silicon science and technology - 2004 : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
808
発行年:
2004
開始ページ:
41
終了ページ:
46
総ページ数:
6
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558997585 [155899758X]
言語:
英語
請求記号:
M23500/808
資料種別:
国際会議録

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