Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors
- 著者名:
Williams, Paul A. Jones, Anthony C. Aspinall, Helen C. Gaskell, Jeffrey M. Chalker, Paul R. Marshall, Paul A. Loo, Yim F. Smith, Lesley M. - 掲載資料名:
- Ferroelectric thin films XII : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 784
- 発行年:
- 2004
- 開始ページ:
- 461
- 終了ページ:
- 466
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997226 [1558997229]
- 言語:
- 英語
- 請求記号:
- M23500/784
- 資料種別:
- 国際会議録
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