Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates

Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates

著者名:

掲載資料名:

Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

782

発行年:

2004

開始ページ:

229

終了ページ:

234

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997202 [1558997202]

言語:

英語

請求記号:

M23500/782

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014439
シリーズID:	PA00000011
会議名:	Symposium on micro- and nanosystems
回次:	2003
会議開催地:	Boston, MA, USA
会議開催年:	2003.12.01-2003.12.03

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