Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes

Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes

著者名:

掲載資料名:

Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

782

発行年:

2004

開始ページ:

37

終了ページ:

42

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997202 [1558997202]

言語:

英語

請求記号:

M23500/782

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014439
シリーズID:	PA00000011
会議名:	Symposium on micro- and nanosystems
回次:	2003
会議開催地:	Boston, MA, USA
会議開催年:	2003.12.01-2003.12.03

類似資料:

1 国際会議録 Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD Chen, L., Fu, X.A., Zorman, C.A., Mehregany, M. Trans Tech Publications	7 国際会議録 Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique Fu, X.A., Dunning, J., Zorman, C.A., Mehregany, M. Trans Tech Publications
2 国際会議録 Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition Fu, X.A., Trevino, J., Mehregany, M., Zorman, C.A. Trans Tech Publications	8 国際会議録 Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices Dunning, J., Fu, X.A., Rajgopal, S., Mehregany, M., Zorman, C.A. Trans Tech Publications
3 国際会議録 Development of a High-Throughput LPCVD Process for Depositing Low Stress Poly-SiC Fu, X.A., Dunning, J., Zorman, C.A., Mehregany, M. Trans Tech Publications	9 国際会議録 Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching Rajan, N., Zorman, C. A., Mehregany, M. Trans Tech Publications
4 国際会議録 Fabrication of 3C-SiC on SiO2 Structures Using Wafer Bonding Techniques Zorman,C.A., Vinod,K.N., Yasseen,A., Mehregany,M. Trans Tech Publications	10 国際会議録 Silicon carbide micro- and nanoelectromechanical systems Mehregany, M., Zorman, C.A. SPIE - The International Society of Optical Engineering
5 国際会議録 Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates Huang, X.M.H., Feng, X.L., Prakash, M.K., Kumar, S., Zorman, C.A., Mehregany, M., Roukes, M.L. Trans Tech Publications	11 国際会議録 Advanced Processing Techniques for Silicon Carbide MEMS and NEMS Zorman, C.A., Mehregany, M. Trans Tech Publications
6 国際会議録 Characterization of LOW Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications Dunning, J., Fu, X.A., Mehregany, M., Zorman, C.A. Trans Tech Publications	12 国際会議録 Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD Fleischman,A.J., Wei,X., Zorman,C.A., Mehregany,M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12