Optical Properties of Anatase, Rutile and Amorphous Phases of TiO2 Thin Films Grown at Room Temperature by RF Magnetron Sputtering

Optical Properties of Anatase, Rutile and Amorphous Phases of TiO2 Thin Films Grown at Room Temperature by RF Magnetron Sputtering

著者名:

掲載資料名:

Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

755

発行年:

2003

開始ページ:

413

終了ページ:

418

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996922 [1558996923]

言語:

英語

請求記号:

M23500/755

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014415
シリーズID:	PA00000011
会議名:	Symposium on solid-state chemistry of inorganic materials
回次:	4th
会議開催地:	Boston, MA, USA
会議開催年:	2002.12.02-2002.12.06

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